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提出一种激光分子束薄膜制备方法,并对制备完成的高温超导薄膜化学稳定性进行研究。以活化气体作为薄膜制备的氧源,选用Sr Ti O3基片作为衬底,临界转变温度和临界电流密度分别控制为85K、1×106A/cm2。分析薄膜的化学稳定性,分析结果显示如果薄膜中含有微量的未反应单质铝,会导致薄膜的化学稳定性发生变化;采用激光分子束制备的薄膜化学稳定性优于内部结构疏松的非晶膜。实验证明采用提出的激光分子束薄膜制备方法生成的高温超导薄膜具有较好的化学稳定性。
A preparation method of laser molecular beam thin film is proposed, and the chemical stability of the prepared high temperature superconducting thin film is studied. The activated gas was used as the oxygen source for the thin film. The SrTiO3 substrate was chosen as the substrate. The critical transition temperature and critical current density were controlled to 85K and 1 × 106A / cm2, respectively. The chemical stability of the film is analyzed. The results show that if the film contains a trace amount of unreacted aluminum, the chemical stability of the film will change. The chemical stability of the film prepared by laser molecular beam is better than that of the uncoated amorphous film . Experiments show that the proposed laser molecular beam thin film preparation method of high temperature superconducting film has good chemical stability.