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论述了在硅基板上用热灯丝法制备金刚石红外增透保护膜的工艺,通过多灯丝法、预打磨处理以及加偏压等方法得到了特性优良的金刚石薄膜,并利用对金刚石薄膜─硅板体系红外透射率的曲线拟合,推知了一系列不易直接测量的特性参数,如折射率,吸收系数,薄膜厚度等。
In this paper, the process of preparing diamond infrared AR coatings by thermal filament method on silicon substrate is discussed. The diamond films with excellent properties are obtained by multi-filament method, pre-grinding treatment and biasing method. The diamond thin film- It is deduced that a series of characteristic parameters, such as refractive index, absorption coefficient, film thickness and so on, which are not easily measured directly.