本文介绍一种用空间滤波检查集成电路光刻掩模的实时白光信息处理系统.采用该系统作检查比传统的镜检法或相干光学处理技术更为简便,且效果显著.借助这种技术能明显地察觉到掩模里的黑点、针孔、刻痕、电路损缺、短路或断路等微小缺陷. In this paper, we introduce a real-time white light information processing system that uses the spatial filter to inspect the lithography mask of the integrated circuit, which is more convenient and effective than traditional microscopy or coherent optical processing. Clearly aware of black spots in the mask, pinholes, nicks, circuit loss, short-circuit or open circuit and other minor defects.