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本文介绍了用称量法测定薄膜铝层厚度的原理与方法,并较详细地给出了数据处理和误差估计,经实际测量认为本方法重复性较好,精度较高,能和其它测试方法得到的结果很好
In this paper, the principle and method of measuring the thickness of aluminum film by weighing method are introduced. The data processing and error estimation are given in detail. The actual measurement shows that the method has good repeatability and high accuracy, and can be used with other testing methods The result is good