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为提高现有喷嘴挡板型电液伺服阀的静、动态性能,采用双压电晶片及铍青铜制作出喷嘴挡板式压电阀的电机械转换器.针对压电层和金属层的宽度、长度和厚度等结构参数对电机械转换器静、动态性能的影响进行了理论、仿真及实验研究.结果表明:宽度对静、动态性能没有影响,输出位移同长度的平方成正比.长度增大时,幅频宽和基频减小;金属层厚度或压电层厚度增大时,输出位移减小,幅频宽和基频增大.最后对电机械转换器的振型进行了仿真分析,结果表明满足设计要求.
In order to improve the static and dynamic performance of the existing nozzle baffle electro-hydraulic servo valve, a bimorph electromechanical converter with a nozzle baffle-type piezoelectric valve was fabricated by using bimorph and beryllium bronze.According to the width of piezoelectric layer and metal layer , The length and the thickness of the electromechanical converter, the static and dynamic performance of the electromechanical converter are studied theoretically, experimentally and experimentally.The results show that the width has no influence on the static and dynamic performance, and the output displacement is proportional to the square of the length When the thickness of the metal layer or the piezoelectric layer increases, the output displacement decreases, the amplitude of the amplitude and the fundamental frequency increase.Finally, the vibration modes of the electromechanical converter are simulated Analysis, the results show that meet the design requirements.