激光-CCD系统衍射谱分析法测量成象光学系统的光学传递函数

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以OTF(光学传递函数)评价成象光学系统的象质目前是一个较为成功的方法。但对于象高倍显微物镜那样的高分辨率光学系统,由于受探测器线性范围和空间分辨率限制,用普通象面扫描方法很难测得象点附近的光强分布;越是分辨率高的镜头,光强分布的细节越容易被探测器丢失。因此目前国内外尚还没有满意的测量高倍显微物镜OTF的方法。而用目前的探测器,由抽样定理和测量实践,证明测量高分辨率光学系统的衍射功率谱是可能的。与象面扫描 Evaluating the image quality of an imaging optical system by OTF (Optical Transfer Function) is currently a more successful method. However, for high-resolution optical systems such as high magnification objectives, it is difficult to measure the light intensity distribution near the image spot by the normal image plane scanning method due to the limitation of the linear range and the spatial resolution of the detector. The higher the resolution Of the lens, the more light intensity distribution of the more easily lost by the detector. So at home and abroad are still not satisfied with the measurement of high magnification microscope objective OTF method. With current detectors, sampling theorems and measurement practices prove that it is possible to measure the diffraction power spectrum of high resolution optical systems. Scan with the image plane
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