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用时域有限差分方法对氧化孔限制型外腔式光子晶体垂直腔面发射激光器(VCSEL)在小氧化孔下氧化孔形状对激光器模式特性的影响进行了模拟计算.建立了三维光子晶体面发射激光器光场计算模型,分析了氧化孔形状变化对器件远场特性与频率特性的影响.研究发现,氧化孔形状可影响光子晶体VCSEL的模式特性,尤其是频谱特性.从模场分布的角度可解释为菱形氧化孔的对称性与高阶模的不一致.但随着光子晶体刻蚀深度的增加和氧化孔的增大,这种影响逐渐减小,分析解释了其原因.研究结果为提高光子晶体面发射激光器的性能提供了参考.
The finite difference time-domain method was used to simulate the influence of the shape of the oxide pores on the mode characteristics of the oxide aperture-limited cavity-cavity photonic crystal vertical cavity surface-emitting lasers (VCSELs) under a small oxidation hole. A three-dimensional photonic crystal surface emitting laser The influence of the shape of the oxide aperture on the far-field and frequency characteristics of the device is analyzed, and it is found that the shape of the oxide aperture can affect the mode characteristic, especially the spectral characteristic, of the photonic crystal VCSEL, which can be explained from the mode field distribution The symmetry of the diamond oxidation holes is inconsistent with that of the higher order modes, but as the depth of photonic crystal etching increases and the oxidation pores increase, the influence decreases gradually, and the reason is explained and analyzed.The results are as follows: Laser performance provides a reference.