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本文介绍了工业压力变送器用全固态结构的SG-75扩散硅压力传感器的研制。传感器压力范围0.16～50MPa,满量程输出120～230mV/0.78mA,精度0.2％F·S,工作温区-30～90℃。该传感器现已批量生产。
This paper introduces the development of SG-75 diffused silicon pressure sensor with all-solid-state structure for industrial pressure transmitter. Sensor pressure range 0.16 ~ 50MPa, full-scale output 120 ~ 230mV / 0.78mA, accuracy 0.2% F · S, working temperature -30 ~ 90 ℃. The sensor is now mass produced.