在解决光干涉测量问题中,各种结构的固定式法布里-珀罗标准具得到了广泛的应用。这种标准具不受外部机械干扰的影响,它的特点是结构紧凑方便,无需调整机构。标准具的这些优点使其能够应用于准确地测量干涉级。在这方面,如果要达到更高的测量准确度就必需采用与程差调制相结合的零位补偿法。在大多数干涉装置中程差 In solving the problem of optical interference measurement, a fixed Fabry-Perot etalon of various structures has been widely used. This standard is not subject to external mechanical interference, which is characterized by compact and convenient structure, without adjusting the mechanism. These advantages of etalons allow them to be used to accurately measure the interference level. In this respect, it is necessary to use a zero compensation method in combination with a path difference modulation if a higher measurement accuracy is to be achieved. In most interference devices range difference