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在数控和数显技术中,感应同步器作为一个新型传感器,由于它具有精度高、性能稳定、寿命长、结构简单、使用方便等优点,得到了日益广泛的应用。但在制造工艺上,由于国内研制的时间不长,尚存在一些难点,不甚成熟。为满足科研生产的需要,我们对圆感应同步器的制造工艺作了一些实践,用“组接光刻法”制出了圆感应同步器的模板,然后利用旋转复制的方法,作出了2秒级的圆感应同步器元件,其零位误差与函数误差均为±1秒。
As a new sensor in NC and digital display technology, induction synchronizer has been widely used due to its advantages of high precision, stable performance, long life, simple structure and easy to use. However, in the manufacturing process, due to the domestic research and development of the time is not long, there are still some difficulties, not mature. In order to meet the needs of scientific research and production, we made some practices on the manufacturing process of the circular inductosyn. We made a template of the circular inductosyn using the “set-and-set photolithography method”, and then made a 2 second Level induction synchronizer components, the zero error and function error are ± 1 seconds.