在卡尔·蔡司公司的DSM940、950和960系列扫描电子显微镜中,这种全数字扫描电镜DSM962被公认为最新颖的产品。这种电镜具有三个超短的双屏蔽电子束透镜,且可以各自单独地予以操纵以提供稳定电流和使图象免于失真变形。它的分辨率可达3.5nm。其涡轮分子泵可将试样的无污染状态提高到最佳程度,从而产生特别清晰的图象。该电镜还提供了一台带有定向应用软件的特别高效的图象处理机,它按照“一个键盘/一个功能”的设计原则处理各种工 DSM940, 950 and 960 Series Scanning Electron Microscopes by Carl Zeiss Corp. The DSM962 is recognized as the most innovative product. The electron microscope has three ultra-short, double-shielded electron beam lenses that can be individually manipulated to provide a steady current and distort the image. Its resolution up to 3.5nm. Its turbo-molecular pump maximizes the contamination-free condition of the sample, resulting in a particularly sharp image. The Electron Microscope also offers a particularly efficient image processor with orientation application software that handles all types of work in accordance with the design principle of “one keyboard / one function”