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本文叙述了用机械研磨和离子减薄技术制备透射电镜界面薄膜试样的方法。应用此法,可在透射电镜中,用衍射法观察界面的缺陷和沉淀相。特别适用于某些材料表面上外延或溅射几微米到十几微米薄层的界面结构的观察。不同材料的界面观察,必须采用离子减薄技术,这是化学腐蚀和电解抛光法所不及的。一、薄膜制备: 机械研磨:将欲观察的样品,切割成2毫米宽的条状试样,用丙酮或酒精清洗后,在4条切割好的试样上,涂上一层环氧树脂(江西宜春慈化化工厂生产的通用双管胶粘剂),然后把其中两条外延(溅射)层面对面相互
This paper describes a method for the preparation of TEM specimen by mechanical grinding and ion thinning. Application of this method, in the transmission electron microscope, the interface defect and precipitation phase was observed by diffraction method. Particularly suitable for some materials on the surface of the epitaxial or sputtering a few microns to ten microns thin layer interface structure observation. Interface observation of different materials, we must use ion-thinning technology, which is chemical etching and electrolytic polishing method can not. First, the film preparation: Mechanical grinding: the sample to be observed, cut into 2 mm wide strip sample, washed with acetone or alcohol, the four cut the sample, coated with a layer of epoxy resin ( Jiangxi Yichun Coking Chemical Factory production of common double-tube adhesive), and then two of the epitaxial (sputtering) layer to face each other