一、激光干涉仪的主要技术指标激光干涉仪的基本测量功能是位移测量,其技术指标是位移测量示值误差。厂家通常称为位移测量准确度、线性测长准确度等。通常的激光干涉仪的位移测量示值误差是±0.5×10-6左右。这种表达方式对于厂家甚至检定机构都是可以的,但是对于使用者就不行了,应该准确的表示为A+BL,A是常数量,B是与量值有关的线性系数,L是位移值。前面的表达 First, the main technical indicators of laser interferometer The basic measurement function of laser interferometer is displacement measurement, the technical indicators displacement measurement indication error. Manufacturers commonly referred to as displacement measurement accuracy, linear length accuracy and so on. The typical laser interferometer displacement measurement indication error is about ± 0.5 × 10-6. This mode of expression for manufacturers and even verification agencies are possible, but for users will not work, it should be accurately expressed as A + BL, A is constant, B is a linear coefficient related to the magnitude, L is the displacement . The front of the expression