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采用磁控溅射在TNMG120408型号的硬质合金刀片上沉积了TiN/Ti(C,N)单层与多层涂层,通过XRD、SEM、纳米压痕、划痕仪与冲击测试等方法,比较分析了TiN/Ti(C,N)涂层的显微组织与力学性能。结果表明,TiN单层涂层的晶粒形貌为典型的喇叭口结构,Ti(C,N)单层涂层为平直的柱状晶结构;而TiN/Ti(C,N)多层涂层为柱状晶结构,形成了TiN、Ti(C,N)交替排列的结构。TiN与Ti(C,N)单层涂层均呈(220)生长织构,而TiN/Ti(C,N)多层涂层呈(111)生长织构。Ti(C,N)单层涂层表现出较好的硬度,而TiN/Ti(C,N)多层涂层则表现出与基体更好的结合力。
TiN / Ti (C, N) monolayer and multilayer coatings were deposited on the TNMG120408 carbide inserts by magnetron sputtering. XRD, SEM, nanoindentation, scratch tester and impact test were used to fabricate TiN / The microstructure and mechanical properties of TiN / Ti (C, N) coatings were compared. The results show that the grain morphology of TiN single layer coating is a typical bell mouth structure, Ti (C, N) single layer coating is a straight columnar crystal structure, while TiN / Ti Layer is a columnar crystal structure, forming TiN, Ti (C, N) alternately arranged structure. TiN and Ti (C, N) monolayer coatings show (220) growth texture, while TiN / Ti (C, N) multilayer coatings exhibit (111) growth texture. Ti (C, N) monolayer coatings showed better hardness, while TiN / Ti (C, N) multilayer coatings showed better adhesion to the matrix.