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本文采用热解化学气相沉积方法,以甲烷和氢气为原料气体,在刀具材料──硬质 合金、金刚石烧结体和立方氮化硼烧结体表面形成了金刚石薄膜,而且研究了金刚石在 上述材料表面上的生长特性。
In this paper, a pyrolytic chemical vapor deposition method, using methane and hydrogen as raw material gases, diamond films were formed on the surface of the tool material ─ ─ cemented carbide, diamond sintered body and cubic boron nitride sintered body, and the diamond in the surface of the above material On the growth characteristics.