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采用离子注入技术将铅离子注入到ITO薄膜玻璃中,用分光光度计、四探针测试仪、硬度计等测定了ITO膜注入前后的光学性能、电学性能、机械性能和化学德定性。结果表明注入后光学、电学性能有所下降,而机械性能和化学稳定性有明显提高。这说明离子注入提高了ITO薄膜玻璃的耐磨损性和在有腐蚀性气氛下的稳定性。
Lead ions were implanted into ITO thin film glass by ion implantation. The optical properties, electrical properties, mechanical properties and chemical densities of ITO films before and after injection were measured by spectrophotometer, four-probe tester and hardness tester. The results show that after injection, the optical and electrical properties have declined, while the mechanical properties and chemical stability have been significantly improved. This shows that ion implantation improves the wear resistance of ITO thin film glass and its stability in a corrosive atmosphere.