由中国电子学会半导体与集成技术学会、中国电子学会电子材料学学会联合举办的第三届全国集成电路和硅材料学术年会,于1983年11月9日～13日在安徽省合肥市召开。参加这次学术会的有来自全国120多个单位共300多位代表。本届年会有256篇报告、其中包括特邀报告6篇,硅材料及其性质研究63篇,理化分析38篇,MOS集成电路研究46 The Third National Conference on Integrated Circuits and Silicon Materials, co-sponsored by the Institute of Semiconductor and Integrated Technology of the Chinese Institute of Electronics and the Institute of Electronic Materials of the Chinese Society of Electronics, was held in Hefei, Anhui Province from November 9 to November 13, 1983. More than 300 representatives from more than 120 units attended the conference. This annual conference has 256 reports, including 6 invited reports, 63 silicon materials and their properties, 38 physical and chemical analysis, MOS integrated circuit research 46