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实验证明可以做出转子直径为0.1mm的电动电机,它为微系统的发展开辟了前景。在用IC工艺做出的材料上形成机械结构,并由此做出精细的器件。这表明,有可能设计出高性能的传感器和致动器,并且能与片上电路相结合。这项研究可能会导致新一代的对工程设计有巨大影响的微系统。这种来源于IC工艺的特殊有效的技术是采用多晶硅和氮化硅作机械材料的。通过腐蚀二氧化硅“牺牲”层使微结构脱离衬底。这种技术开始用来制作静电驱动共振电桥,后又用来制作转动和滑动结构、齿轮、弹簧和最近的徽型电机。需要研究形成微动态结构的电材料的机械特性(这些材料以前专门用在电气学方面)、机械设计的精缩和计算机辅助的有效利用,以提供技术基础,才能完全开发这项技术。微动态元件驱动器电路及信号处理电路向VLSI的设计者们提出了新的挑战。
Experiments show that the rotor can be made of 0.1mm diameter motor, which opened up the prospects for the development of micro-systems. A mechanical structure is formed on the material made with the IC process, and a fine device is thus made. This shows that it is possible to design high-performance sensors and actuators that can be combined with on-chip circuitry. This research may lead to a new generation of microsystems that have a huge impact on engineering. A particularly effective technique derived from the IC process is the use of polysilicon and silicon nitride as the mechanical material. The microstructure is released from the substrate by etching the “sacrificial” layer of silicon dioxide. This technology began to be used to make electrostatically driven resonant bridges, which were later used to make rotating and sliding structures, gears, springs, and the most recent emblematic motors. There is a need to study the mechanical properties of electrical materials that form microdynamic structures that were formerly devoted to electrics, the shrinking of mechanical design, and the efficient use of computer-assisted technology to provide the technical basis for the full development of this technology. Micro-dynamic component driver circuits and signal processing circuits present new challenges to designers of VLSI.