一、概述随着电子工业的发展以及某些尖端科学技术的兴起,超高真空的获得早已成为一个重要的课题。目前,在这方面虽然找到了许多有效的工具,如利用钛泵、离子泵、分子泵等等均可以获得超高真空。但是,这类泵造价昂贵,使用不够方便,有时效果也不够理想。故有不少人在原有基础上对油扩散泵的结构进行了一系列改迸。大大提高了极限真空度,获得了超 I. Overview With the development of the electronics industry and the rise of some cutting-edge science and technology, the acquisition of ultra-high vacuum has long been an important issue. At present, although many effective tools have been found in this area, such as titanium pumps, ion pumps, molecular pumps and the like, ultrahigh vacuum can be obtained. However, such pumps are expensive, not easy to use and sometimes less than ideal. Therefore, many people made a series of improvements to the structure of the oil diffusion pump on the original basis. Greatly increased the ultimate vacuum, access to ultra