HOMOEPITAXY相关论文
碳化硅(SIC)是第三代宽禁带半导体材料,在高温、高频、高功率、光电子及抗辐射等方面具有巨大的应用潜力。以CH4、SiH4为反应气体,H2为......
The homoepitaxial growth of multilayer Si thin film on Si(111) surfaces was simulated by Monte Carlo (MC) method with re......