一、引言目前,世界上很多公司都已进行了单片微波集成电路(MMIC)的试验性生产,MMIC已不再是实验室中的珍品了。将各种模拟功能集成到一个小的砷化镓单片上,其好处是很多的,和混合集成相比,其尺寸大约缩小10倍,部件的价格和装配所需要的时间也可大大降低,而且可以实现更加复杂的功能。目前,在高速度低功耗砷化镓数字电路方面已运用增强 I. INTRODUCTION At present, many companies in the world have conducted experimental production of monolithic microwave integrated circuits (MMIC), and MMIC is no longer a treasury in the laboratory. The benefits of integrating a variety of analog functions onto a single small gallium arsenide substrate are many, and their size is approximately 10x smaller compared to hybrid integration, the cost of components and the time required to assemble can be significantly reduced, And can achieve more complex functions. Currently, there has been an increase in the use of high-speed, low-power gallium arsenide digital circuits