用一束具有一定能量的入射束轰击样品表面,从样品表面上会激发出多种信号。将各种检测器放在适当的位置上进行收集,就构成了不同的谱仪。近年来由于实验技术的飞速发展,出现了多种观察固体表面的新技术。根据入射束和被测信号的不同,可将这些观察技术归纳于表l。俄歇电子能谱分析是一种非破坏性化学分析技术。它具有特别小的深度分辩能力(表面2～3个原子层),特别适用于研究固体表面。作为一种分析工具, Bombarding the sample surface with a beam of incident beam of some energy will excite a variety of signals from the surface of the sample. By placing a variety of detectors in the proper location for collection, different spectrometers are constructed. In recent years due to the rapid development of experimental technology, there are a variety of new technologies to observe the solid surface. According to the incident beam and the measured signal is different, these observations can be summarized in Table l. Auger electron spectroscopy is a non-destructive chemical analysis technique. It has a particularly small depth of resolution (surface 2 to 3 atomic layer), especially for the study of solid surface. As an analytical tool,