在集成电路制造工艺中,由于更多地使用了光学技术,要求自动调焦的地方也不少。例如在掩模的针孔检查上,自动调焦技术已部分被采用。自动调焦技术不单单是对集成电路技术而且对整个光学机械来说都是重要的,对它的研究很早就开始了,专利上的记载也非 In the integrated circuit manufacturing process, due to the greater use of optical technology, requires a lot of automatic focus. For example, in the pinhole inspection of the mask, autofocus technique has been partially adopted. Autofocus technology is not only important for integrated circuit technology but also for the entire optical mechanics, and its research has long since begun to take place, as is the case with patents