日本尼康公司不久前开发成功一种变形光源技术,以提高逐渐缩小式曝光装置的成像清晰度。这种新技术称作“SHRINC”,实际上是通过控制曝光装置的光源照明来实现超高清晰度的技术。目前曝光装置由于多层电路构造,集成化程度越高,表面段差就越显著。因此,人们都在努力研制利用64兆位动态随机存取存储器(DRAM)的曝光分色镜头。尼康公司已经利用这种新技术生产了i线(波长0.356μm)逐渐缩小式曝光装置。在线幅 Japan’s Nikon recently developed a modified light source technology to improve the image resolution of the taper. Known as “SHRINC,” this new technology is in fact a technology that enables ultra-high resolution by controlling the lighting of exposure devices. Currently exposed devices due to multi-layer circuit structure, the higher the degree of integration, the more significant the surface segment difference. Therefore, people are working hard to develop the use of 64 megabit dynamic random access memory (DRAM) of the exposure of the dichroic lens. Nikon Corporation has used this new technology to produce i line (wavelength 0.356μm) taper exposure device. Online