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在1990年的光学技术会议(OPTEC~6 90)上,原西德欧波同(卡尔·蔡司)公司展出Direct 100型干涉仪,应用直接测量干涉术对光学元件进行高精度测试,由于是实时处理,
At the Optical Technology Conference 1990 (OPTEC-6 90), the former West Oberpfalz (Carl Zeiss) company exhibited the Direct 100-type interferometer and used direct measurement interferometry to perform high-precision testing of optical components. Since Real-time processing,