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在过去的几年里,用于晶片加工的工艺控制技术的改进已迅猛增加。 设备研制的投资,传统上主要是以晶片工艺设备的改进为目标,但现在越来越多地把投资集中在开发能够更好地管理和控制品片工艺生产的仪器上。 这种趋势的原因源于经济和技术的考虑。因为工艺控制提高了器件的成品率和性能,所以这是很经济的,同时这也使半导体生产厂家能生产出更为复杂的集成电路,反过来这也需要更好的工艺控制。
Over the past few years, improvements in process control technology for wafer processing have rapidly increased. Investment in device development has traditionally been primarily targeted at improving wafer process equipment, but more and more investment is now concentrated on developing instruments that better manage and control the production of the chip technology. The reason for this trend stems from economic and technical considerations. This is economical because process control increases the yield and performance of the device, and it also enables semiconductor manufacturers to produce more complex integrated circuits that in turn require better process control.