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采用单晶片型压电悬臂梁制作了一种双悬臂梁结构的微型夹持器 ,用作毫米级微型机器人的微操作手。该微夹持器整体尺寸为 15mm× 2mm× 2mm ,重量为 10 0mg。在分析该悬臂梁操作原理的基础上 ,选用PbNi1/ 3 Nb2 / 3 -PbZrO3 -PbTiO3 三元系压电陶瓷准同型相界的配方作为悬臂梁压电驱动材料 ,这种压电陶瓷具有高压电常数 (d3 1)和机电耦合系数 (Kp)。进一步研究了压电微夹持器的操作特性。结果表明 :5 0V电场下 ,其最大张口距离可以达到 4 0 μm ,最大夹持力为 2 5 .7× 10 -3 N。
A single-chip piezo-electric cantilever was fabricated as a micro-cantilever with double cantilever structure and was used as a micro-manipulator for a millimeter-sized robot. The microgripper has an overall size of 15 mm × 2 mm × 2 mm and a weight of 10 0 mg. Based on the analysis of the operation principle of this cantilever beam, the formulation of PbNi1 / 3Nb2 / 3-PbZrO3-PbTiO3 ternary system quasi-homogeneous phase boundary was chosen as the cantilever piezoelectric driving material. The piezoelectric ceramic has high voltage Electric constant (d3 1) and electromechanical coupling coefficient (Kp). The operating characteristics of the piezoelectric microgripper are further studied. The results show that the maximum opening distance can reach 40 μm at 50 V electric field and the maximum clamping force is 25.7 × 10 -3 N.