本文介绍了几种利用光学空间滤波系统和光学-数字混合系统对集成电路模板及半导体芯片、金属网、织物等规则排列的图形中的缺陷进行检查的方法。并从实用出发对基本理论作简要介绍。最后根据金属网衍射图案的特点提出了用一个简单带通滤波器滤波的检查方案。该方案简单实用,便于实现实时自动快速检查,可推广应用到类似产品的检查中。 This article describes several methods for inspecting defects in patterns with regularly arranged patterns such as integrated circuit modules and semiconductor chips, metal mesh, and fabric using optical spatial filtering systems and optical-digital hybrid systems. And a brief introduction to the basic theory from a practical point of view. Finally, according to the characteristics of the metal mesh diffraction pattern, a simple bandpass filter is proposed. The program is simple and practical, easy to achieve real-time automatic rapid inspection, can be extended to similar products in the inspection.