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大尺寸球面厦非球面金属反射镜在一些科学实验和工程装置中有很多用途。本文叙述了用作氙灯集光器的偏离椭球镜和作成像场镜的抛物镜两种大尺寸金属非球面反射镜的真空镀膜工艺,以及氧化硅保护铝反射膜在近紫外及可见光谱区的反射特性。着重讨论了在氧气压下进行一氧化硅气相反应蒸发对提高镜面紫外反射的作用。文中还将讨论蒸气障板在改善大口径镜面涂层均匀性方面的积极作用,并且介绍了有关金属镜面上膜层牢固性能和若干工艺问题,最后罗列了一些参数和实验结果。紫外与可见光谱区的反射率是在斯屈朗多次反射系统中进行测量的。紫外区采用了小功率石英水银灯与IP28(美)光电倍增管作为辐射源与接收器。综合能量——白光的反射率是采用一般的绝对法来测定的。关于镜面的均匀性,在本项工作中主要追求反射能量的均匀,因此不作几何厚度够测量,只观察膜层干涉颜色和实际测量反射率。
Large-size spherical mansions aspherical metal mirrors have many uses in some scientific experiments and engineering installations. This paper describes the vacuum coating process of two kinds of large-size metal aspheric mirrors, which are used as xenon lamp collector ellipsoidal mirrors and parabolic mirrors for imaging field mirrors, and the silicon oxide protective aluminum reflective film in the near ultraviolet and visible region The reflection characteristics. This paper focuses on the effect of vapor phase evaporation of silicon monoxide under oxygen pressure to improve the specular UV reflection. The article will also discuss the positive effect of steam baffle on improving the uniformity of large-caliber mirror coating, and introduces the solid performance and some technical problems on the metal mirror coating. Finally, some parameters and experimental results are listed. Reflectance in the UV and visible spectral regions is measured in a Squarron multiple reflection system. UV uses a low-power quartz mercury lamp and IP28 (United States) photomultiplier tube as a radiation source and receiver. Integrated energy - white light reflectance is measured using the general method of absolute. With regard to the uniformity of the mirror surface, the main consideration in this work is the uniformity of the reflected energy. Therefore, no measurement of the geometric thickness is sufficient, and only the interference color of the film and the actual measured reflectance are observed.